| 目錄 |
| •CH1
緒論 ..................................................................................................................... |
1-1 |
| 第一篇 製造工程篇 ....................................................................................................... |
1-1 |
| •CH2
製程整合工程 ................................................................................................... |
2-1 |
| 2.1
緒論 ................................................................................................................... |
2-1 |
| 2.2
解釋名詞 .......................................................................................................... |
2-14 |
| 2.3
製程、設備說明 ............................................................................................. |
2-26 |
| 2.4 應用 ................................................................................................................... |
2-42 |
| 參考文獻 ................................................................................................................ |
2-45 |
| •CH3
微影成像製造工程 ........................................................................................... |
3-1 |
| 3.1
緒論 ................................................................................................................... |
3-1 |
| 3.2
解釋名詞 .......................................................................................................... |
3-5 |
| 3.3
製程、設備說明 ............................................................................................. |
3-23 |
| 3.4
應用 ................................................................................................................... |
3-29 |
| 參考文獻 ................................................................................................................ |
3-33 |
| •CH4
蝕刻製程 ............................................................................................................ |
4-1 |
| 4.1
緒論 ................................................................................................................... |
4-1 |
| 4.2
解釋名詞 .......................................................................................................... |
4-2 |
| 4.3
製程、設備說明 ............................................................................................. |
4-21 |
| 4.4
應用 ................................................................................................................... |
4-35 |
| 參考文獻 ................................................................................................................ |
4-39 |
| •CH5
薄膜製造工程 ................................................................................................... |
5-1 |
| 5.1
緒論 ................................................................................................................... |
5-1 |
| 5.2
解釋名詞 .......................................................................................................... |
5-4 |
| 5.3
薄膜製程、設備說明 ..................................................................................... |
5-20 |
| 5.4
應用 ................................................................................................................... |
5-45 |
| 參考文獻 ................................................................................................................ |
5-47 |
| •CH6
擴散製造工程 ................................................................................................... |
6-1 |
| 6.1
緒論 ................................................................................................................... |
6-1 |
| 6.2
解釋名詞 .......................................................................................................... |
6-2 |
| 6.3
製程、設備說明 ............................................................................................. |
6-12 |
| 6.4
應用 ................................................................................................................... |
6-35 |
| 參考文獻 ................................................................................................................ |
6-40 |
| •CH7
化學研磨製造工程 ........................................................................................... |
7-1 |
| 7.1
緒論 ................................................................................................................... |
7-1 |
| 7.2
解釋名詞 .......................................................................................................... |
7-5 |
| 7.3
製程、設備說明 ............................................................................................. |
7-18 |
| 7.4
應用 ................................................................................................................... |
7-23 |
| 7.5
未來發展趨勢 .................................................................................................. |
7-24 |
| •CH8
品質保證工程 ................................................................................................... |
8-1 |
| 8.1
緒論 ................................................................................................................... |
8-2 |
| 8.2
解釋名詞 .......................................................................................................... |
8-3 |
| 8.3
新產品、新製程之驗證 ................................................................................ |
8-17 |
| 8.4
製程品質管制 .................................................................................................. |
8-24 |
| 8.5
客戶訴願處理 .................................................................................................. |
8-31 |
| 8.6
品質系統 .......................................................................................................... |
8-33 |
| 參考文獻 ................................................................................................................ |
8-35 |
| •CH9
廠務工程 ............................................................................................................ |
9-1 |
| 9.1
潔淨室系統 ...................................................................................................... |
9-1 |
| 9.2
純水系統及廢水處理系統 ............................................................................ |
9-11 |
| 9.3
氣體及化學系統 ............................................................................................. |
9-23 |
| 9.4
電力系統 .......................................................................................................... |
9-30 |
| •CH10
自動化工程 ...................................................................................................... |
10-1 |
| 10.1
緒論 ................................................................................................................. |
10-1 |
| 10.2
解釋名詞 ........................................................................................................ |
10-2 |
| 10.3
半導體資訊系統的引進與評估 ................................................................. |
10-10 |
| 10.4
半導體前段資訊系統之架構和功能說明 ................................................ |
10-20 |
| 10.5
半導體機台自動化整合 .............................................................................. |
10-32 |
| 10.6
自動倉儲傳送系統 ....................................................................................... |
10-39 |
| 10.7
網路&半導體產業 ....................................................................................... |
10-44 |
| 10.8
半導體資訊管理相關系統簡介 ................................................................. |
10-49 |
| 參考文獻 ................................................................................................................ |
10-52 |
| 第二篇
生產管理篇 ...................................................................................................... |
10-1 |
| •CH11
半導體製造系統 ............................................................................................. |
11-1 |
| 11.1
半導體製造系統的離散事件模式 ............................................................. |
11-1 |
| 11.2
裴氏圖的基本定義 ....................................................................................... |
11-6 |
| 11.3 半導體製造系統的裴氏圖表達機制
......................................................... |
11-9 |
| 11.4 半導體製造系統與管理 .............................................................................. |
11-16 |
| 參考文獻 ................................................................................................................ |
11-17 |
| •CH12
半導體廠生產管理 ......................................................................................... |
12-1 |
| 12.1 緒論 ................................................................................................................. |
12-1 |
| 12.2 半導體工廠組織與功能簡介 ...................................................................... |
12-2 |
| 12.3 半導體製造系統特性 ................................................................................... |
12-3 |
| 12.4 半導體生產管理目標與任務 ...................................................................... |
12-8 |
| 12.5 指標簡介 ........................................................................................................ |
12-12 |
| •CH13
半導體廠生產規劃 ......................................................................................... |
13-1 |
| 13.1 緒論 ................................................................................................................ |
13-1 |
| 13.2 生產規劃管理的目的與內容 ..................................................................... |
13-2 |
| 13.3 半導體廠產能規劃 ....................................................................................... |
13-12 |
| 參考文獻 ................................................................................................................ |
13-17 |
| •CH14
生產線排程與派工 ......................................................................................... |
14-1 |
| 14.1 緒論 ................................................................................................................. |
14-1 |
| 14.2 半導體廠生產排程 ....................................................................................... |
14-2 |
| 14.3 半導體廠現場派工 ....................................................................................... |
14-9 |
| 參考文獻 ................................................................................................................ |
14-16 |
| •CH15
生產現場管理 ................................................................................................. |
15-1 |
| 15.1 人力資源管理 ................................................................................................ |
15-2 |
| 15.2 機台管理 ........................................................................................................ |
15-7 |
| 15.3 現場生產系統與管理實務 .......................................................................... |
15-16 |
| 15.4 控擋片管理 .................................................................................................... |
15-20 |
| 15.5 潔淨室管理 ................................................................................................... |
15-28 |
| 參考文獻 ................................................................................................................ |
15-29 |
| •CH16
製程轉移與量產管理 .................................................................................... |
16-1 |
| 16.1 緒論 ................................................................................................................. |
16-1 |
| 16.2 半導體廠新製程、產品開發到量產的流程
............................................ |
16-3 |
| 16.3 半導體廠新製程技術移轉 .......................................................................... |
16-7 |
| 16.4 半導體廠新製程量產管理 .......................................................................... |
16-17 |
| 參考文獻 ................................................................................................................ |
16-23 |
| •CH17
統計製程管制 ................................................................................................. |
17-1 |
| 17.1品質管理 ......................................................................................................... |
17-1 |
| 17.2 品質管制七大手法 ....................................................................................... |
17-6 |
| 17.3 統計製程管制 ................................................................................................ |
17-16 |
| 17.4 管制圖 ............................................................................................................. |
17-17 |
| 17.5 計量值管制圖 ............................................................................................... |
17-21 |
| 17.6 計量值管制圖 ................................................................................................ |
17-31 |
| 17.7 統計方法在半導體製造的應用 ................................................................. |
17-34 |
| 參考文獻 ................................................................................................................ |
17-36 |
| •CH18
資料挖礦 .......................................................................................................... |
18-1 |
| 18.1 緒論 ................................................................................................................. |
18-1 |
| 18.2 知識發現與資料挖礦 .................................................................................. |
18-2 |
| 18.3 資料挖礦工具 ................................................................................................ |
18-7 |
| 18.4 資料挖礦挖掘結果類型 .............................................................................. |
18-13 |
| 18.5 資料挖礦於半導體製造之應用 ................................................................. |
18-16 |
| 參考文獻 ................................................................................................................ |
18-55 |
| •CH19
半導體業之決策分析與問題解析 ............................................................... |
19-1 |
| 19.1 前言 ................................................................................................................. |
19-1 |
| 19.2 決策分析 ........................................................................................................ |
19-2 |
| 19.3 實例應用之問題解析 ................................................................................... |
19-26 |
| 19.4 結論 ................................................................................................................. |
19-65 |
| 參考文獻 ................................................................................................................ |
19-66 |
| •CH20
主管決策支援系統 ......................................................................................... |
20-1 |
| 20.1 高階主管資訊系統的簡介 .......................................................................... |
20-1 |
| 20.2 EIS的定義 ....................................................................................................... |
20-2 |
| 20.3 EIS的特性 ....................................................................................................... |
20-3 |
| 20.4 EIS在資訊系統中扮演的角色
....................................................................
|
20-4 |
| 20.5 開發EIS的程序 .............................................................................................. |
20-7 |
| 20.6 設計EIS的使用介面 ..................................................................................... |
20-8 |
| 20.7 EIS雛型系統的展示 ..................................................................................... |
20-10 |
| 參考文獻 ................................................................................................................ |
20-18 |
| •CH21
績效衡量與知識管理 .................................................................................... |
21-1 |
| 21.1 前言 ................................................................................................................. |
21-1 |
| 21.2 解釋名詞 ........................................................................................................ |
21-2 |
| 21.3 文獻回顧 ........................................................................................................ |
21-3 |
| 21.4 整合性績效管理系統及其發展程序
......................................................... |
21-8 |
| 21.5總結 .................................................................................................................. |
21-33 |
| 參考文獻 ................................................................................................................ |
21-33 |
| 英文索引 ......................................................................................................................... |
37 |
| 作者簡介 ......................................................................................................................... |
48 |
